MMRL (Maskless Micro-beam Reduction Lithography)
Conceptual and preliminary design by Peter Luft:
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Final design and fabrication by Glenn Jones:
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May 11, 2000
Peter A. Luft,
PALuft@lbl.gov, (510) 486-4574
Glenn E. Jones,
GEJones2@lbl.gov, (510) 486-4667
Lawrence Berkeley National Laboratory
Berkeley, California
